CAE-assisted design analysis reduces the deviation of structural design, improves the stability of the structure, and ensures the long-term stability of accuracy

Single-side direct-drive moving bridge structure, lighter moving mass, drive closer to the moving center of mass, effectively improve the motion performance and accuracy stability

The key structural parts are made of high-precision silicon carbide ceramics, which makes the mobile bridge lighter in mass while having higher rigidity and lower temperature linear expansion. This greatly improves accuracy and long-term reliability

Highly rigid high-performance air-bearing guides, frictionless and wear-free, all three axes adopt four-side encircling design with air-bearing pressure monitoring function to effectively ensure stability

The three axes adopt ultra-low line temperature linear expansion coefficient scale, which is insensitive to temperature change and effectively improves the accuracy of the whole machine

Z-axis adopts flexible balance cylinder to ensure the reliability of Z-axis movement

Z-axis counterbalance cylinders have both pneumatic logic protection and hardware hold-up protection mechanisms to ensure the safety of the detection system in case of emergency