Sub-micron measurement accuracy due to its excellent system design

It adopts a fixed-bridge and high-rigidity mechanical structure, using a combination of granite beams, bases and columns, as well as precision SiC ceramic Z-axis, to maintain the stability of the mechanical structure and strong resistance to external interference

The mobile working platform adopts double dovetail air-float guide rails to ensure good stability

The SiC ceramic Z-axis, with its low coefficient of thermal expansion, high rigidity and light weight, ensures the stability of the measuring system and improves the motion performance

The use of preloaded air bearings in each axis and the circular layout provide high rigidity, no contact, low friction, and low wear, which effectively maintains the machine's lifetime and reduces the number of occurrences of measurement uncertainty

Adopting zero expansion coefficient scale, the resolution is ultra-high to reach the nanometer level, and it is not affected by the external temperature, which ensures the high precision and stability of the machine

Z-axis adopts flexible balance cylinder to ensure the reliability of Z-axis movement

The Z-axis counterbalance cylinders are equipped with two protection mechanisms, pneumatic logic protection and hardware hold-up protection, to ensure the safety of the probing system in case of emergency