DaVinci

DaVinci series is a high-precision solution specifically engineered for overlay error measurement in semiconductor wafer manufacturing process. With its innovative frame design and fully operational automation, it delivers stable and reliable measurement capacapability with sub-nanometer accuracy.

By integrating a user-friendly software interface with automated recipe generation and optimization functions, it significantly simplifies operation workflows, enhances measurement efficiency, and ensures consistency. Additionally, the system is equipped with the standard SECS/GEM communication protocol to ensure seamless integration with fab automation systems, supporting high-throughput demands in mass production environments.