TB1100
For customers with 65 nm-180 nm technology nodes
Compatible with 8-inch/12-inch wafers
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Advantages
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High Sensitivity
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High Throughput
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Intelligent Software Support:
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High SensitivityCapable of consistently detecting defects as small as 70 nm
Advanced signal processing algorithms enhance the signal-to-noise ratio
Broadband technology allows detection of various types of defects
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High ThroughputHigh data rate
Multiple pixel size options
Supports high-speed scanning mode
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Intelligent Software Support:Online Intelligent Classification System SDA
Process Window Qualification
