![15[1]_0019_Vela-03X桌面式系列.png](/Public/Uploads/uploadfile/images/20250524/15[1]0019Vela03Xzhuomianshixilie.png)
![15[1]_0016_Vela-23X-M高速直线电机系列.png](/Public/Uploads/uploadfile/images/20250524/15[1]0016Vela23XMgaosuzhixiandianjixilie.png)
![15[1]_0017_Vela-23-C自动上下料系列.png](/Public/Uploads/uploadfile/images/20250524/15[1]0017Vela23Czidongshangxialiaoxilie.png)
![15[1]_0020_Vela-23X标准在线系列.png](/Public/Uploads/uploadfile/images/20250524/15[1]0020Vela23Xbiaozhunzaixianxilie.png)
TB1500
For customers with 40 nm-55 nm technology nodes
Compatible with 8-inch/12-inch wafers
Scroll to explore
Advantages
-
High Sensitivity
-
High Throughput
-
Intelligent Software Support
-
Independent & Controllable Supply Chain
-
High SensitivityCapable of consistently detecting defects as small as 60 nm
Advanced signal processing algorithms enhance the signal-to-noise ratio
Broadband technology allows detection of various types of defects
-
High ThroughputHigh data rate
Multiple pixel size options
Supports high-speed scanning mode
-
Intelligent Software SupportOnline Intelligent Classification System SDA
Process Window Qualification
Supports Design Care Area
Self-Controllable Domestic Supply Chain
-
Independent & Controllable Supply ChainDeep Ultraviolet High-Throughput Imaging System
High-Speed Deep Ultraviolet TDI Camera
High-Power LSP Light Source
Ultra-Precision Positioning Stage
