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TB2000
For customers targeting 28 nm and below technology nodes
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Advantages
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High sensitivity
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High Throughput
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Intelligent Software Support
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Independent & Controllable Supply Chain
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High sensitivityCapable of consistently detecting defects as small as 30 nm
Advanced signal processing algorithms enhance the signal-to-noise ratio
Deep ultraviolet wideband technology for capturing various defect types
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High ThroughputHigh data rate
Multiple pixel size options
Supports high-speed scanning mode
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Intelligent Software SupportOnline Intelligent Classification System SDA
Process Window Qualification
Supports Design Care Area
Self-Controllable Domestic Supply Chain
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Independent & Controllable Supply ChainDeep Ultraviolet High-Throughput Imaging System
High-Speed Deep Ultraviolet TDI Camera
High-Power LSP Light Source
Ultra-Precision Positioning Stage
