CMZ Zenith Coordinate Measuring Machine

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The CMZ series metrology coordinate measuring machine is a high-end precision metrology equipment developed and manufactured by TZTEK. Featuring a fixed-bridge structure, a granite machine body, and Z-axis made of silicon carbide ceramic, it ensures the high stability of measurement accuracy.
The three-axis linear motor drive eliminates transmission errors. Contactless and wear-free operation enhances accuracy stability, while high response speed improves measurement efficiency. It is suitable for high-precision measurement scenarios in fields such as metrology inspection, semiconductor equipment, aerospace, and electronic information.
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PRODUCT FEATURES

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    Excellent Structure Design
    • The high-rigid fixed-bridge mechanical structure, as well as the combination of granite beams, granite bases,granite columns and Z-axie made of industrial precision material silicon carbide ceramic, ensures the highstability of the mechanical structure and the strong resistance against external interference

    • The mobile working platform adopts double dovetail air-float guide rails to ensure good stability


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    Outstanding Stability
    • The SiC ceramic Z-axis, with its low coefficient of thermal expansion, high rigidity and light weight, ensures the stability of the measuring system and improves the motion performance

    • The use of preloaded air bearings in each axis and the circular layout provide high rigidity, no contact, low friction, and low wear, which effectively maintains the machine's lifetime and reduces the number of occurrences of measurement uncertainty

    • Adopting zero expansion coefficient scale, the resolution is ultra-high to reach the nanometer level, and it is not affected by the external temperature, which ensures the high precision and stability of the machine


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    Safety
    • Z-axis adopts flexible balance cylinder to ensure the reliability of Z-axis movement

    • The Z-axis counterbalance cylinders are equipped with two protection mechanisms, pneumatic logic protection and hardware hold-up protection, to ensure the safety of the probing system in case of emergency


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    Metrological Accuracy
    • Sub-micron measurement accuracy due to its excellent system design

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    In-house Design with Better Compaibility
    • Innovatice linear motor drive techology with TCC motion controller

    • Vispec Cube passed the highest accuracy Class 1 (0.1 μm, 0.1") certification of German PTB

    • Compatible with HSP fixed scanning probe & CSP compact scanning probe

    • Compatible with TR50 articulated head

PRODUCT SPECIFICATIONS

  • CMZ686

  • CMZ8106

  • CMZ10128

  • CMZ10158

  • CMZ121510

  • CMZ122010

RELATED INDUSTRIES

Medical & Healthcare
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Aerospace
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Semiconductor
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Training Certificate Inquiry

Inquiry

If you have any questions regarding the certificate inquiry, please contact us

Training Certificate Query Result

  • Customer Name

    Guo Lianlian

  • Company Name

    Shenzhen Dinghua Xintai Technology Co., Ltd.

  • Training Time

    November 21, 2021

  • Training Content

    1. Basic Introduction, 2. Exposure Operation, 3. Part Number Creation, 4. Daily Maintenance

  • Training Result

    Qualified

  • Certificate Number

    21TZLT011021