TB2000
For 28 nm and below technology nodes
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Advantages
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High Sensitivity
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High Throughput
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Intelligent Software Support
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Independent & Controllable Supply Chain
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High SensitivityDefect detection down to 30 nm
Advanced signal processing for enhanced signal-to-noise ratio
Deep ultraviolet (DUV) broadband illumination for comprehensive defect capture
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High ThroughputHigh data rate
Multiple pixel size options
Optimized for high-speed scanning
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Intelligent Software SupportOnline intelligent classification system SDA
Process window qualification
Supports design care area
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Independent & Controllable Supply ChainHigh-Throughput DUV Imaging System
High-speed deep ultraviolet TDI camera
High-power LSP light source
Ultra-Precision Motion Stage
