Showerhead Metrology
INDUSTRY CHALLENGES
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01Sub-millimeter micro-holes with micron-level tolerances require high-precision metrology for tight dimensional control.
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02
Tens of thousands of densely packed micro-holes make conventional measurement methods too slow for high-throughput inspection.
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03
Large measurement data volumes place heavy demands on data processing performance.
INDUSTRY SOLUTION
As a critical component in CVD equipment, the showerhead uniformly distributes process gases through tens of thousands of micro-holes into the chamber. The dimensional accuracy of these holes directly impacts wafer film uniformity and overall process quality.
Eliminates stop-and-measure cycles by capturing features while the stage moves continuously, significantly increasing measurement throughput.
Supports dedicated circular-path measurement for fast, precise inspection of concentric, radially arranged micro-hole arrays.
KEY ADVANTAGES
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5–10× higher measurement throughput via continuous-motion imaging.
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Supports both linear and circular motion paths.
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Intuitive software enabling simple and efficient operation.
