DaVinci
High-Precision Overlay Metrology System for Advanced Wafer Manufacturing
The DaVinci series is a high-precision overlay metrology system designed for advanced semiconductor wafer manufacturing. Featuring an innovative mechanical architecture and fully automated operation, it delivers stable, reliable overlay measurements with sub-nanometer accuracy.
Designed for advanced foundry applications, the system integrates a user-friendly software interface with automated recipe generation and optimization to streamline measurement workflows while improving throughput and measurement consistency. Support for the industry-standard SECS/GEM protocol enables seamless integration with fab automation systems, meeting the high-throughput requirements of high-volume manufacturing.
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Advantages
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Ultra-High Measurement Accuracy
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Flexible and Easy to Use
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Proven and Reliable
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Ultra-High Measurement AccuracySub-nanometer measurement accuracy
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Flexible and Easy to UseSupports both 200 mm and 300 mm wafers
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Proven and ReliableLow Cost of Ownership, easy maintenance, and no consumables requiring regular replacement
