Brightfield Inspection
INDUSTRY SOLUTION
Designed to meet the stringent inspection requirements of advanced logic processes, TZTEK's brightfield defect inspection solution integrates multiple proprietary technologies to deliver high-sensitivity, high-efficiency, and process-adaptive inspection.
CMO continuous zoom technology supports a minimum inspection pixel size of 36 nm for enhanced small-defect detection. A 3 × 3 pixel high-precision scan region delivers flexible in-line pattern inspection with >90% effective inspection area, improving detection accuracy while reducing noise.
The system supports multi-material optical simulation and full-wave time-domain simulation based on actual process structures, covering wavelengths from 260–600 nm to optimize inline inspection.
A high-speed motion stage synchronizes continuous motion with TDI to reduce step-and-settle time. Combined with HPC, it improves overall data processing and inspection efficiency.
KEY ADVANTAGES
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AI Algorithms & Data Analytics: Intelligent inspection, noise suppression, and support for diverse applications.
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Optical Simulation & Design: Professional simulation engines and comprehensive material libraries enable rapid optical design iteration and optimization.
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High-Speed Precision Motion Stage: Optimized acceleration performance significantly improves overall inspection throughput.
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GDS ROI Technology: Higher ROI accuracy with lower inspection noise.
