Brightfield Inspection
INDUSTRY SOLUTION
CMO continuous zoom technology supports diverse pixel inspection applications, while streamlined software modules enable offline recipe creation for greater workflow efficiency.
A high-speed motion stage synchronizes continuous motion with TDI to reduce step-and-settle time. Combined with HPC, it accelerates data processing and improves inspection throughput.
The system supports multi-material optical simulation and full-wave time-domain simulation based on actual power-device process structures, covering wavelengths from 260–600 nm to optimize inline inspection.
KEY ADVANTAGES
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Optical Simulation: Professional simulation engines and comprehensive material libraries enable effective solution optimization
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High-Speed Motion stage: Faster motion improves overall inspection throughput
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Flexible Software: Broader application coverage, intuitive operation, and more efficient development
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AI Algorithms & Data Analytics: Intelligent inspection, noise suppression, and support for diverse applications
